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13362177588
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33 Xinwen Road, Gongshu District, Hangzhou, Zhejiang

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ZEISS Axio Imager Vario

Automated process for inspecting large samples - compatible with cleanrooms. Check the micro MEMS sensor, XXL chip, and everything in between. The max

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Automated process for inspecting large samples - compatible with cleanrooms.
Check the micro MEMS sensor, XXL chip, and everything in between.
The maximum specimen size is 300 × 300mm, and the maximum specimen thickness is 254 mm. This is a non-destructive method for analyzing large specimens.
The column design ensures stability.
Inspecting wafers in your cleanroom: Axio Imager Vario is DIN EN ISO 14644-1 certified and meets the requirements of cleanroom level ISO 5.
With electric z-axis drive and autofocus system, you can bring low contrast, reflective specimens to perfect focus.
This always produces the best results.
Configure according to your needs
Microscope
Axio imaging device.
A2 Vario (manual, coded)
Axio imaging device.
Z2 Vario (fully electrified)
Axio imaging device.
Z2 Vario (without turret focus)
Lighting method
Reflected light: bright field, dark field DIC、C-DIC、 Polarization
fluorescence
Transmitting light: bright field, dark field DIC、PlasDIC、 Polarization and phase contrast
lighting
Reflected light: LED， Halogen, HBO, XBO
Transmitting light: LED、 halogen
parts
Auto focus, linear sensor, manual and electric stage
Simple. More intelligent. More integration.

Perform non-destructive analysis using a maximum specimen size of 300 × 300mm and an impressive maximum specimen thickness of 254mm.
Whether dealing with heavy samples or working in conjunction with the LSM 700 laser scanning microscope, the sturdy column design provides stability that you can rely on and prevent vibration.
Axio Imager Vario is DIN EN ISO 14644-1 certified and comes with a cleanroom kit that meets the requirements of cleanroom level ISO 5.
• Used for detecting reflective, low contrast sample surfaces, equipped with Axio Imager Vario's fast and efficient autofocus system.
Then, even if your largest specimen will maintain perfect focus and move along the X and Y axes.
Create for your application
Due to the wide range of travel, you can inspect the uniformity and microcracks on the surface of solar cells.
Use cleanroom kits and automatic focusing to identify particles, scratches, and defects on wafers.
• Identify pixel defects in TFT displays under reflected and transmitted light.
Check the photomask holder for excessive chromium film and particles.

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